APA (7th ed.) Citation

Loong, W., Chen, T., Shy, S., Tseng, J., & Lin, R. (1996). TiSix as a new embedded material for attenuated phase shift mask.

Chicago Style (17th ed.) Citation

Loong, W., T. Chen, S. Shy, J. Tseng, and R. Lin. TiSix as a New Embedded Material for Attenuated Phase Shift Mask. 1996.

MLA (9th ed.) Citation

Loong, W., et al. TiSix as a New Embedded Material for Attenuated Phase Shift Mask. 1996.