Citazione Stile APA (7a Edizione)

Loong, W., Chen, T., Shy, S., Tseng, J., & Lin, R. (1996). TiSix as a new embedded material for attenuated phase shift mask.

Citazione stile Chigago Style (17a edizione)

Loong, W., T. Chen, S. Shy, J. Tseng, e R. Lin. TiSix as a New Embedded Material for Attenuated Phase Shift Mask. 1996.

Citatione MLA (9a ed.)

Loong, W., et al. TiSix as a New Embedded Material for Attenuated Phase Shift Mask. 1996.