Loong, W., Chen, T., Shy, S., Tseng, J., & Lin, R. (1996). TiSix as a new embedded material for attenuated phase shift mask.
Chicagoスタイル(17版)引用形式Loong, W., T. Chen, S. Shy, J. Tseng, , R. Lin. TiSix as a New Embedded Material for Attenuated Phase Shift Mask. 1996.
MLA(9版)引用形式Loong, W., et al. TiSix as a New Embedded Material for Attenuated Phase Shift Mask. 1996.
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