Loong, W., Chen, T., Shy, S., Tseng, J., & Lin, R. (1996). TiSix as a new embedded material for attenuated phase shift mask.
芝加哥风格引文Loong, W., T. Chen, S. Shy, J. Tseng, 与 R. Lin. TiSix as a New Embedded Material for Attenuated Phase Shift Mask. 1996.
MLA引文Loong, W., et al. TiSix as a New Embedded Material for Attenuated Phase Shift Mask. 1996.
警告：这些引文格式不一定是100％准确.