TiSix as a new embedded material for attenuated phase shift mask
| Main Authors: | , , , , |
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| Format: | Conference item |
| Published: |
1996
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| _version_ | 1826267060470022144 |
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| author | Loong, W Chen, T Shy, S Tseng, J Lin, R |
| author_facet | Loong, W Chen, T Shy, S Tseng, J Lin, R |
| author_sort | Loong, W |
| collection | OXFORD |
| description | |
| first_indexed | 2024-03-06T20:48:25Z |
| format | Conference item |
| id | oxford-uuid:36bccb69-be64-4c3e-a729-c5a92ea2e168 |
| institution | University of Oxford |
| last_indexed | 2024-03-06T20:48:25Z |
| publishDate | 1996 |
| record_format | dspace |
| spelling | oxford-uuid:36bccb69-be64-4c3e-a729-c5a92ea2e1682022-03-26T13:39:43ZTiSix as a new embedded material for attenuated phase shift maskConference itemhttp://purl.org/coar/resource_type/c_5794uuid:36bccb69-be64-4c3e-a729-c5a92ea2e168Symplectic Elements at Oxford1996Loong, WChen, TShy, STseng, JLin, R |
| spellingShingle | Loong, W Chen, T Shy, S Tseng, J Lin, R TiSix as a new embedded material for attenuated phase shift mask |
| title | TiSix as a new embedded material for attenuated phase shift mask |
| title_full | TiSix as a new embedded material for attenuated phase shift mask |
| title_fullStr | TiSix as a new embedded material for attenuated phase shift mask |
| title_full_unstemmed | TiSix as a new embedded material for attenuated phase shift mask |
| title_short | TiSix as a new embedded material for attenuated phase shift mask |
| title_sort | tisix as a new embedded material for attenuated phase shift mask |
| work_keys_str_mv | AT loongw tisixasanewembeddedmaterialforattenuatedphaseshiftmask AT chent tisixasanewembeddedmaterialforattenuatedphaseshiftmask AT shys tisixasanewembeddedmaterialforattenuatedphaseshiftmask AT tsengj tisixasanewembeddedmaterialforattenuatedphaseshiftmask AT linr tisixasanewembeddedmaterialforattenuatedphaseshiftmask |