TiSix as a new embedded material for attenuated phase shift mask

TiSix as a new embedded material for attenuated phase shift mask

Detalles Bibliográficos
Main Authors:	Loong, W, Chen, T, Shy, S, Tseng, J, Lin, R
Formato:	Conference item
Publicado:	1996

Títulos similares

Additional Siconi™ pre-clean for reliable TiSix contacts in advanced imager technologies
por: M. Grégoire, et al.
Publicado: (2019-03-01)

The new method of fabrication of submicron structures by optical lithography with mask shifting and mask rotation
por: Indykiewicz Kornelia, et al.
Publicado: (2013-02-01)

Application of phase shift masking to sub-0.13 micron lithography
por: Koo, Chee Kiong.
Publicado: (2008)

Application of phase shift masking to sub-micron contact level lithography
por: Choo, Lay Cheng.
Publicado: (2008)

Proximal Algorithms for Discrete-Level Phase-Shifting Mask Design with Application to Optogenetics
por: Dimitris Ampeliotis, et al.
Publicado: (2021-10-01)

Acoustic Attenuation of COVID-19 Face Masks: Correlation to Fibrous Material Porosity, Mask Breathability and Bacterial Filtration Efficiency
por: Milena Martarelli, et al.
Publicado: (2022-02-01)

Phase shift, amplification, oscillation and attenuation of solitons in nonlinear optics
por: Weitian Yu, et al.
Publicado: (2019-01-01)

Determination of seismic attenuation using observed phase shift in sedimentary rocks
por: Baranowski, Jean M
Publicado: (2010)

Precision measurement of attenuation and phase-shift at microwave and millimeter-wave frequencies
por: Wu, Yong.
Publicado: (2012)

New Phase Shifting Algorithms Insensitive to Linear Phase Shift Errors
por: J. Novák
Publicado: (2002-01-01)

Phase-shift mask fabrication at micrometric scale by ion-exchange in glass for astronomical wavefront sensors
por: Prieto-Blanco Xesús, et al.
Publicado: (2020-01-01)

Experimental visualization on ionic liquids interfacial absorption process of CO2 by pixelated-array masked phase-shifting interferometry
por: Lin Chen, et al.
Publicado: (2022-12-01)

Business model shifts : six ways to create new value for customers /
por: Pijl, Patrick van der, author, et al.
Publicado: (2021)

CLINICAL MASKS OF BONE SARCOMAS IN CHILDREN: SIX CLINICAL CASES
por: Maxim Yu. Rykov
Publicado: (2018-04-01)

Optimization of via patterns for 0.13 micrometer copper dual damascene technology using phase shift mask
por: Chen, Hao.
Publicado: (2008)

Intercomparison of photoacoustic and cavity attenuated phase shift instruments: laboratory calibration and field measurements
por: J. Zhang, et al.
Publicado: (2021-10-01)

A new algorithm to estimate attenuation using frequency shift methods
por: Maman Hermana,, et al.
Publicado: (2012)

Mask-Shifting-Based Projection Lithography for Microlens Array Fabrication
por: Jianwen Gong, et al.
Publicado: (2023-10-01)

Tunable Terahertz Wavefront Modulation Based on Phase Change Materials Embedded in Metasurface
por: Ming Zhang, et al.
Publicado: (2022-10-01)

PoMMES: Prevention of Micro-architectural Leakages in Masked Embedded Software
por: Jannik Zeitschner, et al.
Publicado: (2024-07-01)

Compound Optical Film Using Gray Scale Mask Embedded with Microvoids
por: C. T. Pan, et al.
Publicado: (2012-01-01)

Embedding of Ultrathin Chips in Highly Flexible, Photosensitive Solder Mask Resist
por: Florian Janek, et al.
Publicado: (2021-07-01)

Lightweight Conversion from Arithmetic to Boolean Masking for Embedded IoT Processor
por: HanBit Kim, et al.
Publicado: (2019-04-01)

Mask‐Type Acoustic Sensor Featuring a Conventional Disposable Mask Embedded with Electrospun Poly(styrene) Fiber Mats
por: Kenichi Takagaki, et al.
Publicado: (2024-04-01)

Molecular dynamics study of phase transformations in NiTi shape memory alloy embedded with precipitates
por: Jiayi Chen, et al.
Publicado: (2021-01-01)

Acupoint catgut embedding attenuates fibromyalgia pain through attenuation of TRPV1 signaling pathway in mouse
por: Feng-Chen Kao, et al.
Publicado: (2024-01-01)

Complex permittivity of materials at broadband frequency using transmission phase shift method
por: Chan, Yi Lin, et al.
Publicado: (2017)

Hearing Sensitivity to Shifts of Rippled-Spectrum Sound Signals in Masking Noise.
por: Dmitry I Nechaev, et al.
Publicado: (2015-01-01)

Face Masks in the New COVID-19 Normal: Materials, Testing, and Perspectives
por: Ming Hui Chua, et al.
Publicado: (2020-01-01)

Microlenses with annular amplitude and phase masks
por: Paeder V., et al.
Publicado: (2007-01-01)

Phase mask coronagraphy at JPL and Palomar
por: Serabyn E., et al.
Publicado: (2011-07-01)

Performance analysis of dual stator six‐phase embedded‐pole permanent magnet synchronous motor for electric vehicle application
por: Raja Ram Kumar, et al.
Publicado: (2023-03-01)

Effective action recognition with embedded key point shifts
por: Cao, Haozhi, et al.
Publicado: (2022)

Development of saline loaded mask materials, evaluation of the antimicrobial efficacy and survivability of selected bacteria on these mask materials
por: Julnar Evangelista Pepito, et al.
Publicado: (2022-07-01)

The study of a new family of phase masks for three-dimensional fluorescence nanoscopy
por: Gorshelev Aleksei, et al.
Publicado: (2018-01-01)

A Novel Polymeric Adsorbent Embedded with Phase Change Materials (PCMs) Microcapsules: Synthesis and Application
por: Xingang Li, et al.
Publicado: (2019-05-01)

Ab initio molecular dynamics and materials design for embedded phase-change memory
por: Liang Sun, et al.
Publicado: (2021-02-01)

Phase-shifting algorithms with known and unknown phase shifts: comparison and hybrid
por: Chen, Yuchi, et al.
Publicado: (2022)

Sensor-Embedded Face Masks for Detection of Volatiles in Breath: A Proof of Concept Study
por: Lorena Di Zazzo, et al.
Publicado: (2021-12-01)

Efficient Object Detection Based on Masking Semantic Segmentation Region for Lightweight Embedded Processors
por: Heuijee Yun, et al.
Publicado: (2022-11-01)