Measurement and modeling of a diamond deposition reactor: Hydrogen atom and electron number densities in an Ar/H 2 arc jet discharge
The gas-phase chemistry underpinning the growth of polycrystalline diamond in a dc arc jet reactor operating with a CH 4/H 2/Ar mixture was analyzed. A combination of optical emission and cavity ring-down spectroscopy (CRBS) of electronically excited hydrogen atoms and two-dimensional modeling was u...
| Main Authors: | , , , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2005
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