Addressable microlens array for parallel laser microfabrication.
Parallel processing in femtosecond-laser-based microfabrication is demonstrated using a microlens array in conjunction with a liquid-crystal spatial light modulator (SLM). A portion of the SLM is mapped onto each individual lenslet in the array and can be used to effectively switch foci on and off f...
| Main Authors: | , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2011
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