Laser studies of plasmas

Laser studies of plasmas

<p>Measurement of the intrinsic properties of processing plasmas is critically important in understanding discharges so that the optimum conditions can be achieved. Several different diagnostic methods have been developed and tested.</p><p>A planar probe has been used to measure t...

書誌詳細
主要な著者:	Jacobs, R, Jacobs, Robert
その他の著者:	Hancock, G
フォーマット:	学位論文
言語:	English
出版事項:	2000
主題:	Modulation spectroscopy Fluorescence spectroscopy

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