Laser studies of plasmas
<p>Measurement of the intrinsic properties of processing plasmas is critically important in understanding discharges so that the optimum conditions can be achieved. Several different diagnostic methods have been developed and tested.</p><p>A planar probe has been used to measure t...
| Auteurs principaux: | , |
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| Format: | Thèse |
| Langue: | English |
| Publié: |
2000
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