Laser studies of plasmas
<p>Measurement of the intrinsic properties of processing plasmas is critically important in understanding discharges so that the optimum conditions can be achieved. Several different diagnostic methods have been developed and tested.</p><p>A planar probe has been used to measure t...
| 主要な著者: | , |
|---|---|
| その他の著者: | |
| フォーマット: | 学位論文 |
| 言語: | English |
| 出版事項: |
2000
|
| 主題: |