Encapsulated tips for reliable nanoscale conduction in scanning probe technologies.
Nanoscale tip apexes of conducting cantilever probes are important enablers for several conducting probe technologies that require reliable long-term operation, while preserving the nanoscale integrity of the tip apex. In this paper, the concept of an encapsulated tip with a nanoscale conducting cor...
| Main Authors: | , , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
2009
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| Summary: | Nanoscale tip apexes of conducting cantilever probes are important enablers for several conducting probe technologies that require reliable long-term operation, while preserving the nanoscale integrity of the tip apex. In this paper, the concept of an encapsulated tip with a nanoscale conducting core is presented. A method to fabricate such tips on conducting silicon microcantilevers is described. Long-term conduction and wear reliability of these nanoscale tips are evaluated systematically, and their ability to operate for sliding distances greater than 2 m in conduction and 11 m in wear on amorphous carbon is demonstrated. These results are expected to have an impact on the future of conducting probe-based technologies such as probe-based nanometrology, data storage and nanolithography. |
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