Controlled growth of aluminum oxide thin films on hydrogen terminated Si(001) surface

Controlled growth of aluminum oxide thin films on hydrogen terminated Si(001) surface

Bibliographic Details
Main Authors:	Vizzini, S, Oughaddou, H, Leandri, C, Lazarov, V, Kohn, A, Nguyen, K, Coudreau, C, Biberian, J, Ealet, B, Lazzari, J, d'Avitaya, F, Aufray, B
Format:	Journal article
Published:	2007

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