A ROUTE FOR THE FORMATION OF CH2 SPECIES DURING DIAMOND CVD
The reactions of atomic hydrogen with ethylene and acetylene adsorbed on Si(100) have been studied. In the absence of atomic hydrogen, acetylene and ethylene display a comparatively simple surface chemistry, both adsorbing molecularly at low temperatures and dissociating irreversibly to gaseous hydr...
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| Format: | Conference item |
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1995
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