All chemical vapor deposition growth of MoS2:h-BN vertical van der Waals heterostructures.

Vertical van der Waals heterostructures are formed when different 2D crystals are stacked on top of each other. Improved optical properties arise in semiconducting transition metal dichalcogenide (TMD) 2D materials, such as MoS2, when they are stacked onto the insulating 2D hexagonal boron nitride (...

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প্রধান লেখক: Wang, S, Wang, X, Warner, J
বিন্যাস: Journal article
ভাষা:English
প্রকাশিত: American Chemical Society 2015
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author Wang, S
Wang, X
Warner, J
author_facet Wang, S
Wang, X
Warner, J
author_sort Wang, S
collection OXFORD
description Vertical van der Waals heterostructures are formed when different 2D crystals are stacked on top of each other. Improved optical properties arise in semiconducting transition metal dichalcogenide (TMD) 2D materials, such as MoS2, when they are stacked onto the insulating 2D hexagonal boron nitride (h-BN). Most work to date has required mechanical exfoliation of at least one of the TMDs or h-BN materials to form these semiconductor:insulator structures. Here, we report a direct all-CVD process for the fabrication of high-quality monolayer MoS2:h-BN vertical heterostructured films with isolated MoS2 domains distributed across 1 cm. This is enabled by the use of few-layer h-BN films that are more robust against decomposition than monolayer h-BN during the MoS2 growth process. The MoS2 domains exhibit different growth dynamics on the h-BN surfaces compared to bare SiO2, confirming that there is strong interaction between the MoS2 and underlying h-BN. Raman and photoluminescence spectroscopies of CVD-grown MoS2 are compared to transferred MoS2 on both types of substrates, and our results show directly grown MoS2 on h-BN films have smaller lattice strain, lower doping level, cleaner and sharper interfaces, and high-quality interlayer contact.
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spelling oxford-uuid:457eb231-1ae8-4c05-9ce2-80763ad8b7b22022-03-26T15:08:10ZAll chemical vapor deposition growth of MoS2:h-BN vertical van der Waals heterostructures.Journal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:457eb231-1ae8-4c05-9ce2-80763ad8b7b2EnglishSymplectic Elements at OxfordAmerican Chemical Society2015Wang, SWang, XWarner, JVertical van der Waals heterostructures are formed when different 2D crystals are stacked on top of each other. Improved optical properties arise in semiconducting transition metal dichalcogenide (TMD) 2D materials, such as MoS2, when they are stacked onto the insulating 2D hexagonal boron nitride (h-BN). Most work to date has required mechanical exfoliation of at least one of the TMDs or h-BN materials to form these semiconductor:insulator structures. Here, we report a direct all-CVD process for the fabrication of high-quality monolayer MoS2:h-BN vertical heterostructured films with isolated MoS2 domains distributed across 1 cm. This is enabled by the use of few-layer h-BN films that are more robust against decomposition than monolayer h-BN during the MoS2 growth process. The MoS2 domains exhibit different growth dynamics on the h-BN surfaces compared to bare SiO2, confirming that there is strong interaction between the MoS2 and underlying h-BN. Raman and photoluminescence spectroscopies of CVD-grown MoS2 are compared to transferred MoS2 on both types of substrates, and our results show directly grown MoS2 on h-BN films have smaller lattice strain, lower doping level, cleaner and sharper interfaces, and high-quality interlayer contact.
spellingShingle Wang, S
Wang, X
Warner, J
All chemical vapor deposition growth of MoS2:h-BN vertical van der Waals heterostructures.
title All chemical vapor deposition growth of MoS2:h-BN vertical van der Waals heterostructures.
title_full All chemical vapor deposition growth of MoS2:h-BN vertical van der Waals heterostructures.
title_fullStr All chemical vapor deposition growth of MoS2:h-BN vertical van der Waals heterostructures.
title_full_unstemmed All chemical vapor deposition growth of MoS2:h-BN vertical van der Waals heterostructures.
title_short All chemical vapor deposition growth of MoS2:h-BN vertical van der Waals heterostructures.
title_sort all chemical vapor deposition growth of mos2 h bn vertical van der waals heterostructures
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AT wangx allchemicalvapordepositiongrowthofmos2hbnverticalvanderwaalsheterostructures
AT warnerj allchemicalvapordepositiongrowthofmos2hbnverticalvanderwaalsheterostructures