Hesjedal, T., Seidel, W., & Kostial, H. (2002). Near-field phase shift photolithography for high-frequency SAW transducers.
Chicago Style (17th ed.) CitationHesjedal, T., W. Seidel, and H. Kostial. Near-field Phase Shift Photolithography for High-frequency SAW Transducers. 2002.
ציטוט MLAHesjedal, T., et al. Near-field Phase Shift Photolithography for High-frequency SAW Transducers. 2002.
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