Hesjedal, T., Seidel, W., & Kostial, H. (2002). Near-field phase shift photolithography for high-frequency SAW transducers.
Chicago Style (17th ed.) CitationHesjedal, T., W. Seidel, and H. Kostial. Near-field Phase Shift Photolithography for High-frequency SAW Transducers. 2002.
MLA (9th ed.) CitationHesjedal, T., et al. Near-field Phase Shift Photolithography for High-frequency SAW Transducers. 2002.
Warning: These citations may not always be 100% accurate.