Spatially resolved measurement of transverse surface acoustic waves for the investigation of elastic properties

This paper reports new developments in the field of spatially resolved surface acoustic wave (SAW) analysis. With scanning acoustic force microscopy (SAFM) the investigation of SAW phenomena with lateral resolution of the scanning force microscope became possible. This technique was limited to SAW m...

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Main Authors: Behme, G, Hesjedal, T, Chilla, E, Frolich, H
Format: Journal article
Language:English
Published: John Wiley and Sons Ltd 1999
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author Behme, G
Hesjedal, T
Chilla, E
Frolich, H
author_facet Behme, G
Hesjedal, T
Chilla, E
Frolich, H
author_sort Behme, G
collection OXFORD
description This paper reports new developments in the field of spatially resolved surface acoustic wave (SAW) analysis. With scanning acoustic force microscopy (SAFM) the investigation of SAW phenomena with lateral resolution of the scanning force microscope became possible. This technique was limited to SAW modes with an out-of-plane oscillation component. Recently, we demonstrated that purely in-plane polarized SAWs can also be investigated by using a non-linear coupling to the cantilever's torsional movement. Now it is possible to measure the SAW phase velocity dispersion for any given SAW polarization. We used SAFM for investigation of the layered system SiO2 on ST-cut quartz.
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spelling oxford-uuid:4a24a6df-98a9-49c3-9ce9-13f5632e61c72022-03-26T15:35:53ZSpatially resolved measurement of transverse surface acoustic waves for the investigation of elastic propertiesJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:4a24a6df-98a9-49c3-9ce9-13f5632e61c7EnglishSymplectic Elements at OxfordJohn Wiley and Sons Ltd1999Behme, GHesjedal, TChilla, EFrolich, HThis paper reports new developments in the field of spatially resolved surface acoustic wave (SAW) analysis. With scanning acoustic force microscopy (SAFM) the investigation of SAW phenomena with lateral resolution of the scanning force microscope became possible. This technique was limited to SAW modes with an out-of-plane oscillation component. Recently, we demonstrated that purely in-plane polarized SAWs can also be investigated by using a non-linear coupling to the cantilever's torsional movement. Now it is possible to measure the SAW phase velocity dispersion for any given SAW polarization. We used SAFM for investigation of the layered system SiO2 on ST-cut quartz.
spellingShingle Behme, G
Hesjedal, T
Chilla, E
Frolich, H
Spatially resolved measurement of transverse surface acoustic waves for the investigation of elastic properties
title Spatially resolved measurement of transverse surface acoustic waves for the investigation of elastic properties
title_full Spatially resolved measurement of transverse surface acoustic waves for the investigation of elastic properties
title_fullStr Spatially resolved measurement of transverse surface acoustic waves for the investigation of elastic properties
title_full_unstemmed Spatially resolved measurement of transverse surface acoustic waves for the investigation of elastic properties
title_short Spatially resolved measurement of transverse surface acoustic waves for the investigation of elastic properties
title_sort spatially resolved measurement of transverse surface acoustic waves for the investigation of elastic properties
work_keys_str_mv AT behmeg spatiallyresolvedmeasurementoftransversesurfaceacousticwavesfortheinvestigationofelasticproperties
AT hesjedalt spatiallyresolvedmeasurementoftransversesurfaceacousticwavesfortheinvestigationofelasticproperties
AT chillae spatiallyresolvedmeasurementoftransversesurfaceacousticwavesfortheinvestigationofelasticproperties
AT frolichh spatiallyresolvedmeasurementoftransversesurfaceacousticwavesfortheinvestigationofelasticproperties