Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films
Nanocrystalline nickel-tungsten alloys have great potential in the fabrication of components for microelectromechanical systems. Here the fracture toughness of Ni-12.7 at.%W alloy micro-cantilever beams was investigated. Micro-cantilevers were fabricated by UV lithography and electrodeposition and n...
| Main Authors: | , , , , |
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| Format: | Journal article |
| Language: | English |
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2012
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| _version_ | 1826271509531852800 |
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| author | Armstrong, D Haseeb, A Roberts, S Wilkinson, A Bade, K |
| author_facet | Armstrong, D Haseeb, A Roberts, S Wilkinson, A Bade, K |
| author_sort | Armstrong, D |
| collection | OXFORD |
| description | Nanocrystalline nickel-tungsten alloys have great potential in the fabrication of components for microelectromechanical systems. Here the fracture toughness of Ni-12.7 at.%W alloy micro-cantilever beams was investigated. Micro-cantilevers were fabricated by UV lithography and electrodeposition and notched by focused ion beam machining. Load was applied using a nanoindenter and fracture toughness was calculated from the fracture load. Fracture toughness of the Ni-12.7 at.%W was in the range of 1.49-5.14 MPa √m. This is higher than the fracture toughness of Si (another important microelectromechanical systems material), but considerably lower than that of electrodeposited nickel and other nickel based alloys. © 2012 Elsevier B.V. All rights reserved. |
| first_indexed | 2024-03-06T21:57:47Z |
| format | Journal article |
| id | oxford-uuid:4d82f47d-1372-4ace-aece-05e8a3e039af |
| institution | University of Oxford |
| language | English |
| last_indexed | 2024-03-06T21:57:47Z |
| publishDate | 2012 |
| record_format | dspace |
| spelling | oxford-uuid:4d82f47d-1372-4ace-aece-05e8a3e039af2022-03-26T15:55:55ZNanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy filmsJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:4d82f47d-1372-4ace-aece-05e8a3e039afEnglishSymplectic Elements at Oxford2012Armstrong, DHaseeb, ARoberts, SWilkinson, ABade, KNanocrystalline nickel-tungsten alloys have great potential in the fabrication of components for microelectromechanical systems. Here the fracture toughness of Ni-12.7 at.%W alloy micro-cantilever beams was investigated. Micro-cantilevers were fabricated by UV lithography and electrodeposition and notched by focused ion beam machining. Load was applied using a nanoindenter and fracture toughness was calculated from the fracture load. Fracture toughness of the Ni-12.7 at.%W was in the range of 1.49-5.14 MPa √m. This is higher than the fracture toughness of Si (another important microelectromechanical systems material), but considerably lower than that of electrodeposited nickel and other nickel based alloys. © 2012 Elsevier B.V. All rights reserved. |
| spellingShingle | Armstrong, D Haseeb, A Roberts, S Wilkinson, A Bade, K Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films |
| title | Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films |
| title_full | Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films |
| title_fullStr | Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films |
| title_full_unstemmed | Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films |
| title_short | Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films |
| title_sort | nanoindentation and micro mechanical fracture toughness of electrodeposited nanocrystalline ni w alloy films |
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