Hancock, G., & Sucksmith, J. (2002). Optical diagnostics of radio-frequency plasmas containing CHF3 and CHF3/O-2: Laser-induced fluorescence of CF2, CF, and O atoms, and optical emission from H, F, and O.
Chicago-Zitierstil (17. Ausg.)Hancock, G., und J. Sucksmith. Optical Diagnostics of Radio-frequency Plasmas Containing CHF3 and CHF3/O-2: Laser-induced Fluorescence of CF2, CF, and O Atoms, and Optical Emission from H, F, and O. 2002.
MLA-Zitierstil (9. Ausg.)Hancock, G., und J. Sucksmith. Optical Diagnostics of Radio-frequency Plasmas Containing CHF3 and CHF3/O-2: Laser-induced Fluorescence of CF2, CF, and O Atoms, and Optical Emission from H, F, and O. 2002.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.