Optical diagnostics of radio-frequency plasmas containing CHF3 and CHF3/O-2: Laser-induced fluorescence of CF2, CF, and O atoms, and optical emission from H, F, and O
The effect of the addition of O2 to the plasma was studied, both by observations of the reduction of fluorocarbon radical concentrations, and by measurements of group-state O atoms by two-photon excitation and subsequent fluorescence. It was shown that actinometry of O atoms is an unreliable indicat...
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Detalles Bibliográficos
| Autores principales: |
Hancock, G,
Sucksmith, J |
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| Formato: | Journal article
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| Lenguaje: | English |
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| Publicado: |
2002
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