Optical diagnostics of radio-frequency plasmas containing CHF3 and CHF3/O-2: Laser-induced fluorescence of CF2, CF, and O atoms, and optical emission from H, F, and O
The effect of the addition of O2 to the plasma was studied, both by observations of the reduction of fluorocarbon radical concentrations, and by measurements of group-state O atoms by two-photon excitation and subsequent fluorescence. It was shown that actinometry of O atoms is an unreliable indicat...
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| Format: | Journal article |
| Language: | English |
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2002
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| _version_ | 1826271705082888192 |
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| author | Hancock, G Sucksmith, J |
| author_facet | Hancock, G Sucksmith, J |
| author_sort | Hancock, G |
| collection | OXFORD |
| description | The effect of the addition of O2 to the plasma was studied, both by observations of the reduction of fluorocarbon radical concentrations, and by measurements of group-state O atoms by two-photon excitation and subsequent fluorescence. It was shown that actinometry of O atoms is an unreliable indicator of the relative concentration of the ground-state species. |
| first_indexed | 2024-03-06T22:00:53Z |
| format | Journal article |
| id | oxford-uuid:4e8b381f-e8c2-4e38-8e8c-d5f924554a36 |
| institution | University of Oxford |
| language | English |
| last_indexed | 2024-03-06T22:00:53Z |
| publishDate | 2002 |
| record_format | dspace |
| spelling | oxford-uuid:4e8b381f-e8c2-4e38-8e8c-d5f924554a362022-03-26T16:01:47ZOptical diagnostics of radio-frequency plasmas containing CHF3 and CHF3/O-2: Laser-induced fluorescence of CF2, CF, and O atoms, and optical emission from H, F, and OJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:4e8b381f-e8c2-4e38-8e8c-d5f924554a36EnglishSymplectic Elements at Oxford2002Hancock, GSucksmith, JThe effect of the addition of O2 to the plasma was studied, both by observations of the reduction of fluorocarbon radical concentrations, and by measurements of group-state O atoms by two-photon excitation and subsequent fluorescence. It was shown that actinometry of O atoms is an unreliable indicator of the relative concentration of the ground-state species. |
| spellingShingle | Hancock, G Sucksmith, J Optical diagnostics of radio-frequency plasmas containing CHF3 and CHF3/O-2: Laser-induced fluorescence of CF2, CF, and O atoms, and optical emission from H, F, and O |
| title | Optical diagnostics of radio-frequency plasmas containing CHF3 and CHF3/O-2: Laser-induced fluorescence of CF2, CF, and O atoms, and optical emission from H, F, and O |
| title_full | Optical diagnostics of radio-frequency plasmas containing CHF3 and CHF3/O-2: Laser-induced fluorescence of CF2, CF, and O atoms, and optical emission from H, F, and O |
| title_fullStr | Optical diagnostics of radio-frequency plasmas containing CHF3 and CHF3/O-2: Laser-induced fluorescence of CF2, CF, and O atoms, and optical emission from H, F, and O |
| title_full_unstemmed | Optical diagnostics of radio-frequency plasmas containing CHF3 and CHF3/O-2: Laser-induced fluorescence of CF2, CF, and O atoms, and optical emission from H, F, and O |
| title_short | Optical diagnostics of radio-frequency plasmas containing CHF3 and CHF3/O-2: Laser-induced fluorescence of CF2, CF, and O atoms, and optical emission from H, F, and O |
| title_sort | optical diagnostics of radio frequency plasmas containing chf3 and chf3 o 2 laser induced fluorescence of cf2 cf and o atoms and optical emission from h f and o |
| work_keys_str_mv | AT hancockg opticaldiagnosticsofradiofrequencyplasmascontainingchf3andchf3o2laserinducedfluorescenceofcf2cfandoatomsandopticalemissionfromhfando AT sucksmithj opticaldiagnosticsofradiofrequencyplasmascontainingchf3andchf3o2laserinducedfluorescenceofcf2cfandoatomsandopticalemissionfromhfando |