Optical diagnostics of radio-frequency plasmas containing CHF3 and CHF3/O-2: Laser-induced fluorescence of CF2, CF, and O atoms, and optical emission from H, F, and O

Optical diagnostics of radio-frequency plasmas containing CHF3 and CHF3/O-2: Laser-induced fluorescence of CF2, CF, and O atoms, and optical emission from H, F, and O

The effect of the addition of O2 to the plasma was studied, both by observations of the reduction of fluorocarbon radical concentrations, and by measurements of group-state O atoms by two-photon excitation and subsequent fluorescence. It was shown that actinometry of O atoms is an unreliable indicat...

書誌詳細
主要な著者:	Hancock, G, Sucksmith, J
フォーマット:	Journal article
言語:	English
出版事項:	2002

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