Formation of diamond and nanocrystalline diamond films by microwave plasma CVD
Diamond growth was carried out using various kinds of substrates and substrate holders in conventional microwave plasma-enhanced chemical vapor deposition with a mixture of CH4 and H2, and the quality and electrical properties of the diamond films were investigated. The surface morphology and proper...
| Auteurs principaux: | , , , |
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| Format: | Conference item |
| Publié: |
2002
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