High resolution visualization of acoustic wave fields within surface acoustic wave devices
We present the submicron visualization of surface acoustic wave (SAW) fields within interdigital transducers (IDTs) obtained by a scanning acoustic force microscope. Utilizing the nonlinear force curve of the tip-to-surface interaction, a periodic deflection of the cantilever appears when the SAWs a...
| المؤلفون الرئيسيون: | , , |
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| التنسيق: | Journal article |
| منشور في: |
1997
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| الملخص: | We present the submicron visualization of surface acoustic wave (SAW) fields within interdigital transducers (IDTs) obtained by a scanning acoustic force microscope. Utilizing the nonlinear force curve of the tip-to-surface interaction, a periodic deflection of the cantilever appears when the SAWs are excited intermittently. This deflection depends on the amplitude of the surface oscillation and was measured by lock-in technique. SAWs with operating frequencies above 600 MHz were detected. The influence of the mass loading on the local oscillation amplitude was studied for various layer thicknesses of the IDT electrodes. © 1997 American Institute of Physics. |
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