High resolution visualization of acoustic wave fields within surface acoustic wave devices
We present the submicron visualization of surface acoustic wave (SAW) fields within interdigital transducers (IDTs) obtained by a scanning acoustic force microscope. Utilizing the nonlinear force curve of the tip-to-surface interaction, a periodic deflection of the cantilever appears when the SAWs a...
Κύριοι συγγραφείς: | , , |
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Μορφή: | Journal article |
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1997
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