Replicated photonic crystals by atomic layer deposition within holographically defined polymer templates

Replicated photonic crystals by atomic layer deposition within holographically defined polymer templates

We report the replication of holographically defined photonic crystals using multistage atomic layer deposition. Low- and high-temperature atomic layer depositions were combined with selective etching to deposit and remove multiple conformal thin films within three-dimensional polymer templates. Usi...

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Bibliographic Details
Main Authors: Graugnard, E, Roche, O, Dunham, SN, King, J, Sharp, D, Denning, R, Turberfield, A, Summers, C
Format: Journal article
Language:English
Published: 2009
Description
Summary:We report the replication of holographically defined photonic crystals using multistage atomic layer deposition. Low- and high-temperature atomic layer depositions were combined with selective etching to deposit and remove multiple conformal thin films within three-dimensional polymer templates. Using intermediate Al 2 O 3 inverse replicas, temperature- sensitive SU-8 photonic crystal templates were faithfully replicated with TiO 2 and GaP, greatly increasing the dielectric contrasts of the photonic crystals. Optical measurements are in good agreement with the calculated band structures. © 2009 American Institute of Physics.

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