Effects of oxygen plasma treatment on the formation of ohmic contacts to GaN and AlGaN

Bibliographic Details
Main Authors:	Yan, J, Kappers, M, Crossley, A, McAleese, C, Phillips, W, Humphreys, C
Format:	Conference item
Published:	2004

Effects of oxygen plasma treatment on the formation of ohmic contacts to GaN and AlGaN by Yan, J, Kappers, M, Crossley, A, McAleese, C, Phillips, W, Humphreys, C

Published 2004

Journal article

Published 2004

Journal article