Scalable non-volatile tuning of photonic computational memories by automated silicon ion implantation
Photonic integrated circuits (PICs) are revolutionizing the realm of information technology, promising unprecedented speeds and efficiency in data processing and optical communication. However, the nanoscale precision required to fabricate these circuits at scale presents significant challenges, due...
| Main Authors: | , , , , , , , , , , , , , |
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| 格式: | Journal article |
| 語言: | English |
| 出版: |
Wiley
2023
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