Jackman, R., Price, R., & Foord, J. (1989). SEMICONDUCTOR SURFACE ETCHING BY HALOGENS - FUNDAMENTAL STEPS.
Cita Chicago (17th ed.)Jackman, R., R. Price, i J. Foord. SEMICONDUCTOR SURFACE ETCHING BY HALOGENS - FUNDAMENTAL STEPS. 1989.
Cita MLA (9th ed.)Jackman, R., et al. SEMICONDUCTOR SURFACE ETCHING BY HALOGENS - FUNDAMENTAL STEPS. 1989.
Atenció: Aquestes cites poden no estar 100% correctes.