APA (7th ed.) Citation

Jackman, R., Price, R., & Foord, J. (1989). SEMICONDUCTOR SURFACE ETCHING BY HALOGENS - FUNDAMENTAL STEPS.

Chicago Style (17th ed.) Citation

Jackman, R., R. Price, and J. Foord. SEMICONDUCTOR SURFACE ETCHING BY HALOGENS - FUNDAMENTAL STEPS. 1989.

MLA (9th ed.) Citation

Jackman, R., et al. SEMICONDUCTOR SURFACE ETCHING BY HALOGENS - FUNDAMENTAL STEPS. 1989.