THE CHARACTERIZATION OF SILICON SURFACES BY TIME-OF-FLIGHT ATOM PROBE ANALYSIS
New results are presented on the analysis of silicon surfaces in a Time-of-Flight Atom Probe. Comparison is made between the chemical data obtained from conventional voltage pulse and laser pulse desorption. © 1982.
| Main Authors: | , |
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| Format: | Journal article |
| Language: | English |
| Published: |
1982
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| Summary: | New results are presented on the analysis of silicon surfaces in a Time-of-Flight Atom Probe. Comparison is made between the chemical data obtained from conventional voltage pulse and laser pulse desorption. © 1982. |
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