Accuracy of single quantum dot registration using cryogenic laser photolithography

We have registered the position of single InGaAs quantum dots using a novel cryogenic laser photolithography technique. This would be useful in realizing solid state cavity quantum electrodynamics. By fabricating metal alignment markers around the quantum dot, it was registered with an accuracy of 5...

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Những tác giả chính: Lee, K, Green, A, Taylor, R, Waldermann, F, Sena, A, Sharp, D, Turberfield, A, Brossard, F, Williams, D
Định dạng: Journal article
Ngôn ngữ:English
Được phát hành: 2006