Accuracy of single quantum dot registration using cryogenic laser photolithography
We have registered the position of single InGaAs quantum dots using a novel cryogenic laser photolithography technique. This would be useful in realizing solid state cavity quantum electrodynamics. By fabricating metal alignment markers around the quantum dot, it was registered with an accuracy of 5...
| Main Authors: | , , , , , , , , |
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| 格式: | Journal article |
| 語言: | English |
| 出版: |
2006
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