Hydrogen addition for centimeter-sized monolayer tungsten disulfide continuous films by ambient pressure chemical vapor deposition

Monolayer tungsten disulfide (WS 2 ) offers great prospects for use in optoelectronic devices due to its direct bandgap and high photoluminescence intensity. Here, we show how the controlled addition of hydrogen into the chemical vapor deposition growth of WS 2 can lead to the formation of centimet...

Full description

Bibliographic Details
Main Authors: Sheng, Y, Tan, H, Wang, X, Warner, J
Format: Journal article
Published: American Chemical Society 2017
_version_ 1797075671408705536
author Sheng, Y
Tan, H
Wang, X
Warner, J
author_facet Sheng, Y
Tan, H
Wang, X
Warner, J
author_sort Sheng, Y
collection OXFORD
description Monolayer tungsten disulfide (WS 2 ) offers great prospects for use in optoelectronic devices due to its direct bandgap and high photoluminescence intensity. Here, we show how the controlled addition of hydrogen into the chemical vapor deposition growth of WS 2 can lead to the formation of centimeter scale continuous monolayer films at ambient pressure without the need for seed molecules, specially prepared substrates, or low pressure vacuum systems. Modifications of the reaction conditions, including growth time and hydrogen to argon ratio, allow for control over the domain size, film coverage, and film uniformity of the prepared WS 2 film. The combined control of hydrogen and a double-furnace system enables an increases in the growth rate of WS 2 , which results in fully merged films with cm 2 coverage and reduced multilayer content. Field effect transistors are fabricated to demonstrate that WS 2 has high quality for electronic applications. Our ambient pressure chemical vapor deposition reaction is simple and efficient, ideal for mass-production of large area monolayer WS 2 .
first_indexed 2024-03-06T23:53:32Z
format Journal article
id oxford-uuid:737290f6-754c-401e-b0f7-38cfab118b02
institution University of Oxford
last_indexed 2024-03-06T23:53:32Z
publishDate 2017
publisher American Chemical Society
record_format dspace
spelling oxford-uuid:737290f6-754c-401e-b0f7-38cfab118b022022-03-26T19:56:21ZHydrogen addition for centimeter-sized monolayer tungsten disulfide continuous films by ambient pressure chemical vapor depositionJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:737290f6-754c-401e-b0f7-38cfab118b02Symplectic Elements at OxfordAmerican Chemical Society2017Sheng, YTan, HWang, XWarner, JMonolayer tungsten disulfide (WS 2 ) offers great prospects for use in optoelectronic devices due to its direct bandgap and high photoluminescence intensity. Here, we show how the controlled addition of hydrogen into the chemical vapor deposition growth of WS 2 can lead to the formation of centimeter scale continuous monolayer films at ambient pressure without the need for seed molecules, specially prepared substrates, or low pressure vacuum systems. Modifications of the reaction conditions, including growth time and hydrogen to argon ratio, allow for control over the domain size, film coverage, and film uniformity of the prepared WS 2 film. The combined control of hydrogen and a double-furnace system enables an increases in the growth rate of WS 2 , which results in fully merged films with cm 2 coverage and reduced multilayer content. Field effect transistors are fabricated to demonstrate that WS 2 has high quality for electronic applications. Our ambient pressure chemical vapor deposition reaction is simple and efficient, ideal for mass-production of large area monolayer WS 2 .
spellingShingle Sheng, Y
Tan, H
Wang, X
Warner, J
Hydrogen addition for centimeter-sized monolayer tungsten disulfide continuous films by ambient pressure chemical vapor deposition
title Hydrogen addition for centimeter-sized monolayer tungsten disulfide continuous films by ambient pressure chemical vapor deposition
title_full Hydrogen addition for centimeter-sized monolayer tungsten disulfide continuous films by ambient pressure chemical vapor deposition
title_fullStr Hydrogen addition for centimeter-sized monolayer tungsten disulfide continuous films by ambient pressure chemical vapor deposition
title_full_unstemmed Hydrogen addition for centimeter-sized monolayer tungsten disulfide continuous films by ambient pressure chemical vapor deposition
title_short Hydrogen addition for centimeter-sized monolayer tungsten disulfide continuous films by ambient pressure chemical vapor deposition
title_sort hydrogen addition for centimeter sized monolayer tungsten disulfide continuous films by ambient pressure chemical vapor deposition
work_keys_str_mv AT shengy hydrogenadditionforcentimetersizedmonolayertungstendisulfidecontinuousfilmsbyambientpressurechemicalvapordeposition
AT tanh hydrogenadditionforcentimetersizedmonolayertungstendisulfidecontinuousfilmsbyambientpressurechemicalvapordeposition
AT wangx hydrogenadditionforcentimetersizedmonolayertungstendisulfidecontinuousfilmsbyambientpressurechemicalvapordeposition
AT warnerj hydrogenadditionforcentimetersizedmonolayertungstendisulfidecontinuousfilmsbyambientpressurechemicalvapordeposition