GETTERING OF COPPER IN SILICON - PRECIPITATION AT EXTENDED SURFACE-DEFECTS

Bibliographic Details
Main Authors:	Decoteau, M, Wilshaw, P, Falster, R
Format:	Conference item
Published:	1991

GETTERING OF COPPER IN SILICON - PRECIPITATION AT EXTENDED SURFACE-DEFECTS by Decoteau, M, Wilshaw, P, Falster, R

Published 1991

Journal article