Composition and its impact on shape evolution in dislocated Ge(Si)/Si islands

The composition distribution of Ge(Si)/Si (001) islands grown at 700°C by molecular beam epitaxy is investigated using high-spatial resolution x-ray energy dispersive spectrometry in a scanning transmission electron microscope. Island shapes are investigated using cross-section transmission electron...

Ամբողջական նկարագրություն

Մատենագիտական մանրամասներ
Հիմնական հեղինակներ: Liao, X, Zou, J, Cockayne, D, Jiang, Z, Wang, X, Leon, R
Ձևաչափ: Journal article
Լեզու:English
Հրապարակվել է: 2000
Նկարագրություն
Ամփոփում:The composition distribution of Ge(Si)/Si (001) islands grown at 700°C by molecular beam epitaxy is investigated using high-spatial resolution x-ray energy dispersive spectrometry in a scanning transmission electron microscope. Island shapes are investigated using cross-section transmission electron microscopy. Results show nonuniformity of the composition distribution in the islands, which affects the evolution of the aspect ratios of height-to-base diameter of dislocated islands. © 2000 American Institute of Physics.