NEW RESULTS AND AN INTERPRETATION FOR SEM EBIC CONTRAST ARISING FROM INDIVIDUAL DISLOCATIONS IN SILICON.

The SEM EBIC contrast for individual screw and 60 degree dislocations formed in high-purity, n-type 10**1**5 cm** minus **3 silicon by deformation has been measured and found to vary with both specimen temperature and electron beam current. A new theory of recombination at dislocations has been deve...

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Main Authors: Wilshaw, P, Booker, G
Format: Conference item
Published: 1985
_version_ 1797077932793921536
author Wilshaw, P
Booker, G
author_facet Wilshaw, P
Booker, G
author_sort Wilshaw, P
collection OXFORD
description The SEM EBIC contrast for individual screw and 60 degree dislocations formed in high-purity, n-type 10**1**5 cm** minus **3 silicon by deformation has been measured and found to vary with both specimen temperature and electron beam current. A new theory of recombination at dislocations has been developed and applied to the EBIC method. The new theory explains the experimental results and enables parameters associated with the recombination process at the individual dislocations, e. g. energy level, density of states, etc. , to be deduced.
first_indexed 2024-03-07T00:25:08Z
format Conference item
id oxford-uuid:7de329d4-6ec9-4859-bfe2-8d21b5636156
institution University of Oxford
last_indexed 2024-03-07T00:25:08Z
publishDate 1985
record_format dspace
spelling oxford-uuid:7de329d4-6ec9-4859-bfe2-8d21b56361562022-03-26T21:06:33ZNEW RESULTS AND AN INTERPRETATION FOR SEM EBIC CONTRAST ARISING FROM INDIVIDUAL DISLOCATIONS IN SILICON.Conference itemhttp://purl.org/coar/resource_type/c_5794uuid:7de329d4-6ec9-4859-bfe2-8d21b5636156Symplectic Elements at Oxford1985Wilshaw, PBooker, GThe SEM EBIC contrast for individual screw and 60 degree dislocations formed in high-purity, n-type 10**1**5 cm** minus **3 silicon by deformation has been measured and found to vary with both specimen temperature and electron beam current. A new theory of recombination at dislocations has been developed and applied to the EBIC method. The new theory explains the experimental results and enables parameters associated with the recombination process at the individual dislocations, e. g. energy level, density of states, etc. , to be deduced.
spellingShingle Wilshaw, P
Booker, G
NEW RESULTS AND AN INTERPRETATION FOR SEM EBIC CONTRAST ARISING FROM INDIVIDUAL DISLOCATIONS IN SILICON.
title NEW RESULTS AND AN INTERPRETATION FOR SEM EBIC CONTRAST ARISING FROM INDIVIDUAL DISLOCATIONS IN SILICON.
title_full NEW RESULTS AND AN INTERPRETATION FOR SEM EBIC CONTRAST ARISING FROM INDIVIDUAL DISLOCATIONS IN SILICON.
title_fullStr NEW RESULTS AND AN INTERPRETATION FOR SEM EBIC CONTRAST ARISING FROM INDIVIDUAL DISLOCATIONS IN SILICON.
title_full_unstemmed NEW RESULTS AND AN INTERPRETATION FOR SEM EBIC CONTRAST ARISING FROM INDIVIDUAL DISLOCATIONS IN SILICON.
title_short NEW RESULTS AND AN INTERPRETATION FOR SEM EBIC CONTRAST ARISING FROM INDIVIDUAL DISLOCATIONS IN SILICON.
title_sort new results and an interpretation for sem ebic contrast arising from individual dislocations in silicon
work_keys_str_mv AT wilshawp newresultsandaninterpretationforsemebiccontrastarisingfromindividualdislocationsinsilicon
AT bookerg newresultsandaninterpretationforsemebiccontrastarisingfromindividualdislocationsinsilicon