A simple technique to readout and characterize coupled MEMS resonators
Highly sensitive microelectromechanical system (MEMS) resonators have been used for extensive applications such as mass sensing. However, these arrays are prone to process variations and are difficult to characterize due to lack of connections with each resonator. Coupled array of such sensors can e...
| Những tác giả chính: | , |
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| Định dạng: | Journal article |
| Được phát hành: |
Institute of Electrical and Electronics Engineers
2016
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