Nitrogen-doped silicon: Mechanical, transport and electrical properties

A novel dislocation locking technique is used to study the behaviour of nitrogen in float-zone silicon (FZ-Si). Specimens containing well-defined arrays of dislocation half-loops are subjected to isothermal anneals of controlled duration, during which nitrogen diffuses to the dislocations. The stres...

תיאור מלא

מידע ביבליוגרפי
Main Authors: Murphy, J, Alpass, C, Giannattasio, A, Senkader, S, Emiroglu, D, Evans-Freeman, J, Falster, R, Wilshaw, P
פורמט: Journal article
שפה:English
יצא לאור: 2006