Modeling the non-equilibrium process of the chemical adsorption of ammonia on GaN(0001) reconstructed surfaces based on steepest-entropy-ascent quantum thermodynamics

<p>Clearly understanding elementary growth processes that depend on surface reconstruction is essential to controlling vapor-phase epitaxy more precisely. In this study, ammonia chemical adsorption on GaN(0001) reconstructed surfaces under metalorganic vapor phase epitaxy (MOVPE) conditions (3...

Full description

Bibliographic Details
Main Authors: Kusaba, A, Li, G, Von Spakovsky, MR, Kangawa, Y, Kakimoto, K
Format: Journal article
Language:English
Published: MDPI 2017
_version_ 1797078780352659456
author Kusaba, A
Li, G
Von Spakovsky, MR
Kangawa, Y
Kakimoto, K
author_facet Kusaba, A
Li, G
Von Spakovsky, MR
Kangawa, Y
Kakimoto, K
author_sort Kusaba, A
collection OXFORD
description <p>Clearly understanding elementary growth processes that depend on surface reconstruction is essential to controlling vapor-phase epitaxy more precisely. In this study, ammonia chemical adsorption on GaN(0001) reconstructed surfaces under metalorganic vapor phase epitaxy (MOVPE) conditions (3Ga-H and N<sub>ad</sub>-H + Ga-H on a 2 × 2 unit cell) is investigated using steepest-entropy-ascent quantum thermodynamics (SEAQT). SEAQT is a thermodynamic-ensemble based, first-principles framework that can predict the behavior of non-equilibrium processes, even those far from equilibrium where the state evolution is a combination of reversible and irreversible dynamics. SEAQT is an ideal choice to handle this problem on a first-principles basis since the chemical adsorption process starts from a highly non-equilibrium state. A result of the analysis shows that the probability of adsorption on 3Ga-H is significantly higher than that on N<sub>ad</sub>-H + Ga-H. Additionally, the growth temperature dependence of these adsorption probabilities and the temperature increase due to the heat of reaction is determined. The non-equilibrium thermodynamic modeling applied can lead to better control of the MOVPE process through the selection of preferable reconstructed surfaces. The modeling also demonstrates the efficacy of DFT-SEAQT coupling for determining detailed non-equilibrium process characteristics with a much smaller computational burden than would be entailed with mechanics-based, microscopic-mesoscopic approaches.</p>
first_indexed 2024-03-07T00:36:37Z
format Journal article
id oxford-uuid:81a4b301-a6c0-44e9-8562-c6dc7d7d2c25
institution University of Oxford
language English
last_indexed 2024-03-07T00:36:37Z
publishDate 2017
publisher MDPI
record_format dspace
spelling oxford-uuid:81a4b301-a6c0-44e9-8562-c6dc7d7d2c252022-03-26T21:31:38ZModeling the non-equilibrium process of the chemical adsorption of ammonia on GaN(0001) reconstructed surfaces based on steepest-entropy-ascent quantum thermodynamicsJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:81a4b301-a6c0-44e9-8562-c6dc7d7d2c25EnglishSymplectic Elements at OxfordMDPI2017Kusaba, ALi, GVon Spakovsky, MRKangawa, YKakimoto, K<p>Clearly understanding elementary growth processes that depend on surface reconstruction is essential to controlling vapor-phase epitaxy more precisely. In this study, ammonia chemical adsorption on GaN(0001) reconstructed surfaces under metalorganic vapor phase epitaxy (MOVPE) conditions (3Ga-H and N<sub>ad</sub>-H + Ga-H on a 2 × 2 unit cell) is investigated using steepest-entropy-ascent quantum thermodynamics (SEAQT). SEAQT is a thermodynamic-ensemble based, first-principles framework that can predict the behavior of non-equilibrium processes, even those far from equilibrium where the state evolution is a combination of reversible and irreversible dynamics. SEAQT is an ideal choice to handle this problem on a first-principles basis since the chemical adsorption process starts from a highly non-equilibrium state. A result of the analysis shows that the probability of adsorption on 3Ga-H is significantly higher than that on N<sub>ad</sub>-H + Ga-H. Additionally, the growth temperature dependence of these adsorption probabilities and the temperature increase due to the heat of reaction is determined. The non-equilibrium thermodynamic modeling applied can lead to better control of the MOVPE process through the selection of preferable reconstructed surfaces. The modeling also demonstrates the efficacy of DFT-SEAQT coupling for determining detailed non-equilibrium process characteristics with a much smaller computational burden than would be entailed with mechanics-based, microscopic-mesoscopic approaches.</p>
spellingShingle Kusaba, A
Li, G
Von Spakovsky, MR
Kangawa, Y
Kakimoto, K
Modeling the non-equilibrium process of the chemical adsorption of ammonia on GaN(0001) reconstructed surfaces based on steepest-entropy-ascent quantum thermodynamics
title Modeling the non-equilibrium process of the chemical adsorption of ammonia on GaN(0001) reconstructed surfaces based on steepest-entropy-ascent quantum thermodynamics
title_full Modeling the non-equilibrium process of the chemical adsorption of ammonia on GaN(0001) reconstructed surfaces based on steepest-entropy-ascent quantum thermodynamics
title_fullStr Modeling the non-equilibrium process of the chemical adsorption of ammonia on GaN(0001) reconstructed surfaces based on steepest-entropy-ascent quantum thermodynamics
title_full_unstemmed Modeling the non-equilibrium process of the chemical adsorption of ammonia on GaN(0001) reconstructed surfaces based on steepest-entropy-ascent quantum thermodynamics
title_short Modeling the non-equilibrium process of the chemical adsorption of ammonia on GaN(0001) reconstructed surfaces based on steepest-entropy-ascent quantum thermodynamics
title_sort modeling the non equilibrium process of the chemical adsorption of ammonia on gan 0001 reconstructed surfaces based on steepest entropy ascent quantum thermodynamics
work_keys_str_mv AT kusabaa modelingthenonequilibriumprocessofthechemicaladsorptionofammoniaongan0001reconstructedsurfacesbasedonsteepestentropyascentquantumthermodynamics
AT lig modelingthenonequilibriumprocessofthechemicaladsorptionofammoniaongan0001reconstructedsurfacesbasedonsteepestentropyascentquantumthermodynamics
AT vonspakovskymr modelingthenonequilibriumprocessofthechemicaladsorptionofammoniaongan0001reconstructedsurfacesbasedonsteepestentropyascentquantumthermodynamics
AT kangaway modelingthenonequilibriumprocessofthechemicaladsorptionofammoniaongan0001reconstructedsurfacesbasedonsteepestentropyascentquantumthermodynamics
AT kakimotok modelingthenonequilibriumprocessofthechemicaladsorptionofammoniaongan0001reconstructedsurfacesbasedonsteepestentropyascentquantumthermodynamics