Resonant interferometric lithography beyond the diffraction limit
| Main Authors: | , , |
|---|---|
| Format: | Journal article |
| Language: | English |
| Published: |
Optical Society of America
2009
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| _version_ | 1826282114846294016 |
|---|---|
| author | Kiffner, M Evers, J Zubairy, MS |
| author_facet | Kiffner, M Evers, J Zubairy, MS |
| author_sort | Kiffner, M |
| collection | OXFORD |
| description | |
| first_indexed | 2024-03-07T00:38:58Z |
| format | Journal article |
| id | oxford-uuid:8261952e-ebac-4b65-b315-a323b1804301 |
| institution | University of Oxford |
| language | English |
| last_indexed | 2024-03-07T00:38:58Z |
| publishDate | 2009 |
| publisher | Optical Society of America |
| record_format | dspace |
| spelling | oxford-uuid:8261952e-ebac-4b65-b315-a323b18043012022-03-26T21:37:03ZResonant interferometric lithography beyond the diffraction limitJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:8261952e-ebac-4b65-b315-a323b1804301EnglishSymplectic Elements at OxfordOptical Society of America2009Kiffner, MEvers, JZubairy, MS |
| spellingShingle | Kiffner, M Evers, J Zubairy, MS Resonant interferometric lithography beyond the diffraction limit |
| title | Resonant interferometric lithography beyond the diffraction limit |
| title_full | Resonant interferometric lithography beyond the diffraction limit |
| title_fullStr | Resonant interferometric lithography beyond the diffraction limit |
| title_full_unstemmed | Resonant interferometric lithography beyond the diffraction limit |
| title_short | Resonant interferometric lithography beyond the diffraction limit |
| title_sort | resonant interferometric lithography beyond the diffraction limit |
| work_keys_str_mv | AT kiffnerm resonantinterferometriclithographybeyondthediffractionlimit AT eversj resonantinterferometriclithographybeyondthediffractionlimit AT zubairyms resonantinterferometriclithographybeyondthediffractionlimit |