Growth of large single-crystalline monolayer hexagonal boron nitride by oxide-assisted chemical vapor deposition

e show how an oxide passivating layer on the Cu surface before the growth of h-BN by chemical vapor deposition (CVD) can lead to increased domain sizes from 1 to 20 μm by reducing the nucleation density from 10 6 to 10 3 mm -2 . The h-BN domains within each Cu grain are well-oriented, indicating a...

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Main Authors: Chang, R-J, Wang, X, Wang, S, Sheng, Y, Porter, BF, Bhaskaran, H, Warner, JH
Format: Journal article
Published: American Chemical Society 2017
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author Chang, R-J
Wang, X
Wang, S
Sheng, Y
Porter, BF
Bhaskaran, H
Warner, JH
author_facet Chang, R-J
Wang, X
Wang, S
Sheng, Y
Porter, BF
Bhaskaran, H
Warner, JH
author_sort Chang, R-J
collection OXFORD
description e show how an oxide passivating layer on the Cu surface before the growth of h-BN by chemical vapor deposition (CVD) can lead to increased domain sizes from 1 to 20 μm by reducing the nucleation density from 10 6 to 10 3 mm -2 . The h-BN domains within each Cu grain are well-oriented, indicating an epitaxial relationship between the h-BN crystals and the Cu growth substrates that leads to larger crystal domains within the film of ∼100 μm. Continuous films are grown and show a high degree of monolayer uniformity. This CVD approach removes the need for low pressures, electrochemical polishing, and expensive substrates for large-area continuous films of h-BN monolayers, which is beneficial for industrial applications that require scalable synthesis.
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spelling oxford-uuid:832a58b0-4ece-41fc-8579-6f95aee0ac2e2022-03-26T21:42:22ZGrowth of large single-crystalline monolayer hexagonal boron nitride by oxide-assisted chemical vapor depositionJournal articlehttp://purl.org/coar/resource_type/c_dcae04bcuuid:832a58b0-4ece-41fc-8579-6f95aee0ac2eSymplectic Elements at OxfordAmerican Chemical Society2017Chang, R-JWang, XWang, SSheng, YPorter, BFBhaskaran, HWarner, JHe show how an oxide passivating layer on the Cu surface before the growth of h-BN by chemical vapor deposition (CVD) can lead to increased domain sizes from 1 to 20 μm by reducing the nucleation density from 10 6 to 10 3 mm -2 . The h-BN domains within each Cu grain are well-oriented, indicating an epitaxial relationship between the h-BN crystals and the Cu growth substrates that leads to larger crystal domains within the film of ∼100 μm. Continuous films are grown and show a high degree of monolayer uniformity. This CVD approach removes the need for low pressures, electrochemical polishing, and expensive substrates for large-area continuous films of h-BN monolayers, which is beneficial for industrial applications that require scalable synthesis.
spellingShingle Chang, R-J
Wang, X
Wang, S
Sheng, Y
Porter, BF
Bhaskaran, H
Warner, JH
Growth of large single-crystalline monolayer hexagonal boron nitride by oxide-assisted chemical vapor deposition
title Growth of large single-crystalline monolayer hexagonal boron nitride by oxide-assisted chemical vapor deposition
title_full Growth of large single-crystalline monolayer hexagonal boron nitride by oxide-assisted chemical vapor deposition
title_fullStr Growth of large single-crystalline monolayer hexagonal boron nitride by oxide-assisted chemical vapor deposition
title_full_unstemmed Growth of large single-crystalline monolayer hexagonal boron nitride by oxide-assisted chemical vapor deposition
title_short Growth of large single-crystalline monolayer hexagonal boron nitride by oxide-assisted chemical vapor deposition
title_sort growth of large single crystalline monolayer hexagonal boron nitride by oxide assisted chemical vapor deposition
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