Growth and characterization of high-density mats of single-walled carbon nanotubes for interconnects
We grow high-density, aligned single wall carbon nanotube mats for use as interconnects in integrated circuits by remote plasma chemical vapor deposition from a Fe- Al2 O3 thin film catalyst. We carry out extensive Raman characterization of the resulting mats, and find that this catalyst system give...
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Détails bibliographiques
| Auteurs principaux: |
Robertson, J,
Zhong, G,
Telg, H,
Thomsen, C,
Warner, J,
Briggs, G,
Dettlaff-Weglikowska, U,
Roth, S |
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| Format: | Journal article
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| Langue: | English |
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| Publié: |
2008
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