Growth and characterization of high-density mats of single-walled carbon nanotubes for interconnects
We grow high-density, aligned single wall carbon nanotube mats for use as interconnects in integrated circuits by remote plasma chemical vapor deposition from a Fe- Al2 O3 thin film catalyst. We carry out extensive Raman characterization of the resulting mats, and find that this catalyst system give...
Mô tả đầy đủ
Chi tiết về thư mục
| Những tác giả chính: |
Robertson, J,
Zhong, G,
Telg, H,
Thomsen, C,
Warner, J,
Briggs, G,
Dettlaff-Weglikowska, U,
Roth, S |
|---|
| Định dạng: | Journal article
|
|---|
| Ngôn ngữ: | English |
|---|
| Được phát hành: |
2008
|
|---|