Growth and characterization of high-density mats of single-walled carbon nanotubes for interconnects

We grow high-density, aligned single wall carbon nanotube mats for use as interconnects in integrated circuits by remote plasma chemical vapor deposition from a Fe- Al2 O3 thin film catalyst. We carry out extensive Raman characterization of the resulting mats, and find that this catalyst system give...

সম্পূর্ণ বিবরণ

গ্রন্থ-পঞ্জীর বিবরন
প্রধান লেখক: Robertson, J, Zhong, G, Telg, H, Thomsen, C, Warner, J, Briggs, G, Dettlaff-Weglikowska, U, Roth, S
বিন্যাস: Journal article
ভাষা:English
প্রকাশিত: 2008