SPUTTERING OF A CU SOLID BY SICL4 MOLECULES
We present a theoretical investigation on the sputtering of a Cu solid by SiCl//4 molecules. The classical trajectory method is used to calculate Cu atom sputtering yields, degrees of anisotropy, kinetic energy distributions and angular distributions for collision energies up to 1000 eV. The only pr...
| Main Authors: | , , |
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| Format: | Journal article |
| Language: | English |
| Published: |
1987
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