A CMOS Image Sensor Integrated with Plasmonic Colour Filters

A CMOS Image Sensor Integrated with Plasmonic Colour Filters

Multi-pixel, 4. 5 × 9 μm, plasmonic colour filters, consisting of periodic subwavelength holes in an aluminium film, were directly integrated on the top surface of a complementary metal oxide semiconductor (CMOS) image sensor (CIS) using electron beam lithography and dry etch. The 100 × 100-pixel pl...

وصف كامل

التفاصيل البيبلوغرافية
المؤلفون الرئيسيون: Chen, Q, Das, D, Chitnis, D, Walls, K, Drysdale, T, Collins, S, Cumming, D
التنسيق: Journal article
اللغة:English
منشور في: 2012

مواد مشابهة

مواد مشابهة