A CMOS Image Sensor Integrated with Plasmonic Colour Filters

A CMOS Image Sensor Integrated with Plasmonic Colour Filters

Multi-pixel, 4. 5 × 9 μm, plasmonic colour filters, consisting of periodic subwavelength holes in an aluminium film, were directly integrated on the top surface of a complementary metal oxide semiconductor (CMOS) image sensor (CIS) using electron beam lithography and dry etch. The 100 × 100-pixel pl...

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Bibliografiske detaljer
Main Authors:	Chen, Q, Das, D, Chitnis, D, Walls, K, Drysdale, T, Collins, S, Cumming, D
Format:	Journal article
Sprog:	English
Udgivet:	2012

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