CHARACTERIZATION OF PLASMA-DEPOSITED AMORPHOUS HYDROGENATED CARBON-FILMS BY NEUTRON REFLECTIVITY
Thin films (less than 2000 Å) of amorphous hydrogenated carbon have been characterized by neutron reflectivity measurements. Films were deposited onto silicon substrates from a methane r.f. plasma to produce both very hard and very soft materials. The critical angle and density give the film composi...
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Bibliographic Details
| Main Authors: |
Grundy, M,
Richardson, R,
Roser, S,
Beamson, G,
Brennan, W,
Howard, J,
Oneil, M,
Penfold, J,
Shackleton, C,
Ward, R |
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| Format: | Journal article
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| Language: | English |
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| Published: |
1989
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